多晶硅冷氢化过程模拟研究

王绪根, 李梦丽, 徐壮, 郭俊恒, 高素芳

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石河子大学学报 ›› 2021, Vol. 39 ›› Issue (6) : 661-667. DOI: 10. 13880 /j.cnki.65-1174 /n.2021. 21. 053
化工·材料·食品

多晶硅冷氢化过程模拟研究

  • 王绪根, 李梦丽, 徐壮, 郭俊恒, 高素芳
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Simulation study on cold hydrogenation process of polysilicon

  • WANG Xugen , LI Mengli , XU Zhuang , GUO Junheng , GAO Sufang 
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摘要

随着新能源和信息工业的快速发展,多晶硅生产的重要性日益凸显,我国企业主要采用改良西门子法生产多 晶硅,并将四氯化硅( SiCl4 /STC) 转换为三氯氢硅( SiHCl3 /TCS) ,STC 冷氢化过程是其中重要一环,但对其研究还不 够,STC 冷氢化在氯化亚铜催化剂作用下于 400~ 600 ℃下进行,较高的反应温度需要考虑热力学平衡,因此,本文 主要运用 Aspen Plus 化工模拟软件对多晶硅生产过程中 STC 冷氢化过程的热力学和动力学反应过程进行模拟计 算,系统分析反应过程,确定 STC 冷氢化反应 4 个独立反应和总反应,并对反应热随温度的变化进行分析,再计算 H2 /STC 摩尔比、反应温度、反应压力等条件对产物平衡组成的影响,并给出其适宜条件,最后输入动力学模型参 数,对活塞流反应器的换热方式进行研究,结果发现绝热式反应器结构简单、易于控制,更适合 STC 冷氢化反应 过程。

Abstract

With the rapid development of new energy and information industry,the importance of polysilicon production has become prominent increasingly. Chinese enterprises mainly produce polysilicon by the improved Siemens method,and silicon tetrachloride ( SiCl4 /STC) is converted into trichlorosilane ( SiHCl3 /TCS) .The STC cold hydrogenation process is an important part,but its research is not enough.STC cold hydrogenation is carried out under the action of cuprous chloride catalyst at 400~ 600 ℃,the high reaction temperature requires consideration of thermodynamic equilibrium,therefore,this article mainly used Aspen Plus chemical simulation software simulates and calculates the thermodynamic and kinetic reaction process of the STC cold hydrogenation process in the polysilicon production process.First,the reaction process was systematically analyzed,four independent reactions and the total reaction of the STC cold hydrogenation reaction were determined,the change of the reaction heat with temperature was analyzed,then the H2 /STC molar ratio,reaction temperature,reaction pressure and other conditions were used to balance the product.The influence of the composition was given,and the appropriate conditions were given.Finally,the kinetic model parameters were input and the heat exchange mode of the plug flow reactor was studied.It was found that the adiabatic reactor had a simple structure,easy to control and more suitable for the STC cold hydrogenation process.an important indicator of ecological security and sustainable utilization of resources,soil quality is of great significance for sustainable development.In order to understand the status of soil heavy metal pollution and ecological risk in the arid zone of central Ningxia,40 soil samples were collected from 5 counties,according to the background value of Ningxia soil,the pollution status of six heavy metals ( Cu,Zn,Pb,Cr,Mn and Ni) in soil was diagnosed,and the pollution degree was analyzed by single factor pollution index method and potential ecological risk index method.The results showed that the coefficient of variation of heavy metal elements in the soil ranged from 26. 10% to 59. 72%,among which the contents of Zn,Pb and Mn were higher than the background value of Ningxia soil; the spatial distribution of heavy metal content in soil is different,showing patchy; the average value of single factor pollution index from large to small was Pb= Zn > Mn > Cr > Cu > Ni,and the soil heavy metals were in mild pollution In addition to Pb,the ecological risk of other heavy metals in the study area is low,and Pb is the main potential ecological risk factor; the RI value of the six heavy metals was 78. 70,and the degree of ecological risk in the study area is slight.In order to promote the development of green and sustainable economy and provide decision-making reference for regional soil quality optimization,heavy metal pollution and ecological risk in the central arid zone of Ningxia were studied. 

 

关键词

多晶硅 / 冷氢化 / Aspen Plus / 热力学平衡

Key words

polysilicon / cold hydrogenation / Aspen Plus / thermodynamic equilibrium

引用本文

导出引用
王绪根, 李梦丽, 徐壮, 郭俊恒, 高素芳. 多晶硅冷氢化过程模拟研究. 石河子大学学报. 2021, 39(6): 661-667 https://doi.org/10. 13880 /j.cnki.65-1174 /n.2021. 21. 053
WANG Xugen , LI Mengli , XU Zhuang , GUO Junheng , GAO Sufang . Simulation study on cold hydrogenation process of polysilicon. Journal of Shihezi University. 2021, 39(6): 661-667 https://doi.org/10. 13880 /j.cnki.65-1174 /n.2021. 21. 053

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基金

兵团重大科技项目( 2017AA07,2020AA004)
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